
北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD

| blocking torque MB |
2.1 Ncm |
| max. normal force FN |
1.5 N |
| max. radial force FXY |
2.5 N |
| positioner dimension |
Ø 50 mm x 35 mm |
| weight |
≈ 120 g |
| sensor resolution |
0.1 μrad / 1 nm |
| closed-loop resolution |
0.2 μrad / 2 nm |
| -HV (10-6 mbar), -UHV / -UHVT (10-11 mbar) |
| travel |
± 25 ° |
| step width |
6 – 150 μrad |
| scan range |
140 μrad |
| scan resolution |
< 0.1 μrad |
| velocity |
30 °/s |