SLC-1760压电位移台

产品详情
产品参数

 
Mechanical Properties
blocking force FB

> 3.5 N

max. normal force FN

30 N

max. lift force FL

> 1.5 N

positioner dimension

60 x 17 x 8.5 mm3

weight

38 g

pitch torque MP

7.6 Nm

yaw torque MY

7.6 Nm

roll torque MR

1.4 Nm

Positioning
travel

± 20.50 (41) mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

 
Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 60 nm 2