SLLA42压电位移台

产品详情
产品参数

 
Mechanical Properties
blocking force FB

> 5 N

max. normal force FN

30 N

max. lift force FL

> 1.5 N

carriage dimension

54 x 60 x 16 mm3

weight of carriage

148 g

weight of rail

286 g / 100 mm

pitch torque MP

25 Nm

yaw torque MY

25 Nm

roll torque MR

90 Nm

Positioning
rail length

70 .. 1480 mm

step width

1 – 1,500 nm 1

scan range

> 3 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

 
 
Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 70 .. 450 nm 2