
北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD

| blocking force FB |
> 3.5 N |
| max. normal force FN |
30 N |
| max. lift force FL |
> 1.5 N |
| positioner dimension |
40 x 17 x 8.5 mm3 |
| weight |
26 g |
| pitch torque MP |
3.0 Nm |
| yaw torque MY |
3.0 Nm |
| roll torque MR |
1.0 Nm |
| travel |
± 13 (26) mm |
| step width |
1 – 1,500 nm 1 |
| scan range |
> 1.5 µm |
| scan resolution |
< 1 nm |
| velocity |
> 20 mm/s |
| max. frequency |
18.5 kHz |
| sensor resolution |
1 nm |
| repeatability |
± 40 nm 2 |