北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| max. normal force FN |
80 N |
| max. lift force FL |
80 N |
| positioner dimension |
41 x 86 x 50 mm3 |
| weight |
340 g |
| travel |
± 0.5 (1) mm |
| step width |
1 – 150 nm |
| scan range |
> 500 µm |
| scan resolution |
< 1 nm |
| velocity |
> 1 mm/s |
| max. frequency |
10 kHz |
| sensor resolution |
1 nm |
| repeatability |
± 100 nm 1 |
