北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| max. vertical load FV |
2.5 N |
| max. horizontal force FH |
1.25 N |
| positioner dimension |
115 x 101.4 x 25 mm3 |
| weight |
≈ 400 g |
| x |
11 mm |
| y |
11 mm |
| z |
5 mm |
| Θx |
18 ° |
| Θy |
20 ° |
| Θz |
37 ° |
| smallest increment (x,y,z) |
1 nm |
| smallest increment (Θx,y,z) |
1 µrad |
| repeatability for full travel range 1 (x,y,z) |
± 200 nm |
| repeatability for full travel range 1 (Θx,y,z) |
± 10 µrad |
| repeatability for 1 mm travel range 1 (x,y,z) |
± 15 nm |
