北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| max. vertical load FV |
5 N |
| max. horizontal force FH |
2.5 N |
| positioner dimension |
> 110 x 80 x 67 mm3 |
| weight |
≈ 200 .. 1000 g |
| x |
48 mm |
| y |
28 .. 48 mm |
| z |
≤ 9 mm |
| Θx |
≤ 28 ° |
| Θy |
≤ 26 ° |
| Θz |
≤ 20 ° |
| smallest increment (x,y,z) |
1 nm |
| smallest increment (Θx,y,z) |
1 µrad |
| repeatability for full travel range 2 (x,y,z) |
± 200 nm |
| repeatability for full travel range 2 (Θx,y,z) |
± 10 µrad |
| repeatability for 1 mm travel range 2 (x,y,z) |
± 15 nm |
