北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
Travel | 100-1500 mm |
Load capacity | > 65 kg |
Moving mass | 10 kg |
Stage mass | 50-175 kg |
Accuracy | 0,3-1 μm |
Repeatability | 0,1-0,4 μm |
Flatness | 0,2-5 μm |
Pitch | 4-39 μrad |
Roll | 4-39 μrad |
Yaw | 4-39 μrad |