北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| Part Number | 3715477 |
| Footprint | 60mm W x 60mm D x 31mm H |
| Material | Stainless Steel |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/10N |
| Stage Mass | 365g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 50µm|50µm|20µm |
| Open-loop Travel (-30 to 150 V) | 65µm|65µm|35µm |
| Position Noise | 0.2nm|0.2nm|0.1nm |
| Stiffness | 3N/µm|3N/µm|14N/µm |
| Resonant Frequency | 1200Hz|1200Hz|2000Hz |
| Settling Time | 4ms|4ms|2ms |
| Linearity Deviation | 0.01%|0.01%|0.1% |
| Capacitance | 2.8µF|2.8µF|1.6µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
